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MEMSnet Home: MEMS-Talk: Lifting-Off 1um metal
Lifting-Off 1um metal
2009-01-15
James Paul Grant
2009-01-15
Edward Sebesta
2009-01-15
ilan yutsis
2009-01-16
Wilson, Thomas
2009-01-16
Edward Sebesta
2009-01-16
Kirt Williams
2009-01-16
Wilson, Thomas
2009-01-16
James Paul Grant
2009-01-16
Ruiz, Marcos Daniel (SENCOE)
2009-01-16
Edward Sebesta
2009-01-17
Jie Zou
2009-01-15
Jon R. Fox
2009-01-16
saravan kallempudi
2009-01-16
Ruiz, Marcos Daniel (SENCOE)
Lifting-Off 1um metal
Kirt Williams
2009-01-16
I've also seen that standard polypropylene plastic wafer storage boxes can
outgas something that coats the wafers.

In contact-angle measurements on aluminum, a freshly cleaned surface had
zero contact angle.

After three days, the front wafer in the box had an increase in contact
angle to 35 deg, while the one behind it remained at zero contact angle.

    --Kirt Williams

----- Original Message -----
From: "Edward Sebesta" 
To: "'General MEMS discussion'" 
Sent: Thursday, January 15, 2009 5:39 PM
Subject: Re: [mems-talk] Lifting-Off 1um metal

>I can vouch for this. Plastic containers can be the source of many
> process problems from adhesion to corrosion due to outgassing. I have
> seen many cases over the years.
>
> Ed
>
reply
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