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MEMSnet Home: MEMS-Talk: Lifting-Off 1um metal
Lifting-Off 1um metal
2009-01-15
James Paul Grant
2009-01-15
Edward Sebesta
2009-01-15
ilan yutsis
2009-01-16
Wilson, Thomas
2009-01-16
Edward Sebesta
2009-01-16
Kirt Williams
2009-01-16
Wilson, Thomas
2009-01-16
James Paul Grant
2009-01-16
Ruiz, Marcos Daniel (SENCOE)
2009-01-16
Edward Sebesta
2009-01-17
Jie Zou
2009-01-15
Jon R. Fox
2009-01-16
saravan kallempudi
2009-01-16
Ruiz, Marcos Daniel (SENCOE)
Lifting-Off 1um metal
saravan kallempudi
2009-01-16
Dear James Paul Grant,

For any good liftoff the ratio of PR to the metal should be 2.5:1
And physical evaporating equipment like sputter should be considered for
depositing as it forms conformal layers.
With E beam evaporators planar layers will be formed and its hard to make a
liftoff with such a small ratio 1.3 : 1


Kallempudi Sreenivasa Saravan
PhD student, Electronics Engineering
reply
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