Isn't conformality bad for lift-off?  We've seen problems with stringers
when we deposit metal on the sidewalls of the resist.

Dan

________________________________

From: [email protected] on behalf of saravan kallempudi
Sent: Fri 1/16/09 9:38 AM
To: [email protected]
Subject: Re: [mems-talk] Lifting-Off 1um metal

Dear James Paul Grant,

For any good liftoff the ratio of PR to the metal should be 2.5:1
And physical evaporating equipment like sputter should be considered for =
depositing as it forms conformal layers.
With E beam evaporators planar layers will be formed and its hard to =
make a liftoff with such a small ratio 1.3 : 1

Kallempudi Sreenivasa Saravan
PhD student, Electronics Engineering