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MEMSnet Home: MEMS-Talk: front back photolitography
front back photolitography
2009-01-18
Andrea Mazzolari
2009-01-18
Bill Moffat
2009-02-04
DaddiO
2009-01-19
Reza Rashidi
front back photolitography
Andrea Mazzolari
2009-01-18
Hello all,
i need to perform front and back photolitography.

On each side of a 4'' silicon wafer i need to realize geometries of size
10um. Geometries on the opposite wafer faces must be aligned with the best
possible accuracy.
Here we don't have the possibility to realize front-back photolitography
and so i plan to ask to some company to do the job for me.

Which is the best precision accuracy which can be obtained on the market ?

Best regards,
Andrea

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