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MEMSnet Home: MEMS-Talk: Deposition of Chromium and Platinum
Deposition of Chromium and Platinum
2009-01-19
Yinyan Gong
2009-01-19
Ruiz, Marcos Daniel (SENCOE)
2009-01-20
Yinyan Gong
2009-01-20
Ruiz, Marcos Daniel (SENCOE)
2009-01-19
John Hilton
2009-01-19
Edward Sebesta
2009-01-20
Yinyan Gong
2009-01-20
Edward Sebesta
2009-01-22
Evelyn B
2009-01-20
Jie Zou
Deposition of Chromium and Platinum
Yinyan Gong
2009-01-19
Dear All,

I have a hard time to deposit Chromium (50nm) followed by Platinum
(100nm) using a e-beam evaporator. After lift-off (using 1165), some
areas of the metal layer will peel off and the rest part has very rough
surface. I note that during deposition of Pt, the temperatures is quite
high and I have to interrupt the deposition when the temperature reaches
90C and let the system cool down before depositing again. Any
suggestions will be appreciated.

Best regards

Yinyan
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