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MEMSnet Home: MEMS-Talk: Deposition of Chromium and Platinum
Deposition of Chromium and Platinum
2009-01-19
Yinyan Gong
2009-01-19
Ruiz, Marcos Daniel (SENCOE)
2009-01-20
Yinyan Gong
2009-01-20
Ruiz, Marcos Daniel (SENCOE)
2009-01-19
John Hilton
2009-01-19
Edward Sebesta
2009-01-20
Yinyan Gong
2009-01-20
Edward Sebesta
2009-01-22
Evelyn B
2009-01-20
Jie Zou
Deposition of Chromium and Platinum
Jie Zou
2009-01-20
I evaporated Cr and Au. The great difference in stress between them
sometimes brought about the peeling off (especially after heating). Maybe it
helps.

Jie

On Mon, Jan 19, 2009 at 10:33 AM, Yinyan Gong wrote:

> Dear All,
>
> I have a hard time to deposit Chromium (50nm) followed by Platinum (100nm)
> using a e-beam evaporator. After lift-off (using 1165), some areas of the
> metal layer will peel off and the rest part has very rough surface. I note
> that during deposition of Pt, the temperatures is quite high and I have to
> interrupt the deposition when the temperature reaches 90C and let the system
> cool down before depositing again. Any suggestions will be appreciated.
>
> Best regards
>
> Yinyan

*  Zou Jie (Jay)
*  Department of Physics
*  University of Florida
*  Tel: +1-352-846-8018
*  Email: [email protected]
*  Homepage: http://plaza.ufl.edu/zoujie/
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