MEMS-talk

News	MEMSnet Home: MEMS-Talk: Deposition of Chromium and Platinum Deposition of Chromium and Platinum 2009-01-19 Yinyan Gong 2009-01-19 Ruiz, Marcos Daniel (SENCOE) 2009-01-20 Yinyan Gong 2009-01-20 Ruiz, Marcos Daniel (SENCOE) 2009-01-19 John Hilton 2009-01-19 Edward Sebesta 2009-01-20 Yinyan Gong 2009-01-20 Edward Sebesta 2009-01-22 Evelyn B 2009-01-20 Jie Zou Deposition of Chromium and Platinum Yinyan Gong 2009-01-20 Substrate is boron compound and the total thickness of the metal layer is 150nm. The thickness of Shipley 1165 is about 1.3um. Yinyan Ruiz, Marcos Daniel (SENCOE) wrote: > What substrate material are you using? How thick are the metal layers? > reply
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