I don't have experience with Chromium and boron compounds, but Chromium
will usually adhere pretty well to most things.  One thing you might try
is to set your Chromium thickness to 300 angstroms or more to ensure you
have complete coverage of the substrate.  You can try to reduce it again
after you get it working at this thickness.

Most adhesion issues are due to improper surface preparation (assuming
the correct adhesion film is being used).  If this process was working
before and now has problems, try to find what changed that would affect
the condition of your substrate surface before deposition.  If this
process is new and has never worked, consider changing your cleaning and
drying processes.

Sorry I can't be more specific, but my experience is with glass and
silicon substrates.

Dan

-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of Yinyan Gong
Sent: Tuesday, January 20, 2009 1:48 AM
To: General MEMS discussion
Subject: Re: [mems-talk] Deposition of Chromium and Platinum

Substrate is boron compound and the total thickness of the metal layer
is 150nm. The thickness of Shipley 1165 is about 1.3um.

Yinyan