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MEMSnet Home: MEMS-Talk: PMMA-950K-A6 resist peeling problem after Ni-Au deposition
PMMA-950K-A6 resist peeling problem after Ni-Au deposition
2009-01-20
basar bolukbas
2009-01-22
Kagan Topalli
2009-01-23
basar bolukbas
2009-01-21
Ananth Krishnan
2009-01-23
basar bolukbas
2009-01-25
Ananth Krishnan
2009-01-25
basar bolukbas
PMMA-950K-A6 resist peeling problem after Ni-Au deposition
basar bolukbas
2009-01-20
Hello,

I am trying to deposite Ni-Au metal layers (500A-3500A) to PMMA-950K-A6 resist
but
after every deposition, i observed some resist/metal peeling problem.
This bubble like structures trigger the removing of the metal layers.
Do you have any suggestion or solution about this problem?

Thank you for your answers.
reply
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