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MEMSnet Home: MEMS-Talk: PMMA-950K-A6 resist peeling problem after Ni-Au deposition
PMMA-950K-A6 resist peeling problem after Ni-Au deposition
2009-01-20
basar bolukbas
2009-01-22
Kagan Topalli
2009-01-23
basar bolukbas
2009-01-21
Ananth Krishnan
2009-01-23
basar bolukbas
2009-01-25
Ananth Krishnan
2009-01-25
basar bolukbas
PMMA-950K-A6 resist peeling problem after Ni-Au deposition
basar bolukbas
2009-01-23
Dear Kagan,

Actually i could try such a post bake step, but i didnt want to damage to
futures.
I need a clear undercut for easy liftoff beacuse of my thick metal layers.
If you suggest a post bake receipe for this kind of application i can try.
Thank you very much for helping.

Best Regards.
reply
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