Dear Ananth,

I appreciate your help.

1. Yes we have oven, and i will try your suggestions as soon as possible.
2. Is this post bake condition damage to futures? (future size is 300nm.)
3. I make deposition step by step like your suggestion.
Exm: 500A deposition - 5min cooling time (rate:3A/sec.)

I think these conditions are not enough for cooling of samples?

Best regards.