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MEMSnet Home: MEMS-Talk: Double lithography problem with SU1828-TI35ES
Double lithography problem with SU1828-TI35ES
2009-01-29
basar bolukbas
2009-01-29
Bill Moffat
2009-01-30
basar bolukbas
2009-01-30
Bill Moffat
2009-01-30
basar bolukbas
2009-01-30
Edward Sebesta
2009-01-30
basar bolukbas
2009-02-02
Edward Sebesta
Double lithography problem with SU1828-TI35ES
basar bolukbas
2009-01-29
Hello everyone,

I am making lithography with SU1828. After patterning of this resist,
i need to make a another lithography on top of SU1828's patterns, but when i
spin to other resist (TI35ES) the solvent of TI35ES dissolves to patterns of
SU1828.

Do you have similar experience?

Thank you very much for your help.

Best Regards.
reply
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