>Dear MEMS researchers:
>
>I am now using SU8-25 to make microfluidics components, I wonder if any
>one of you can tell me the processing parameters of SU8-25?
>
>Thank you very much for your help.
>
>Sincerely
>
>Tao Xu
>Graduate Student
>Dept. of Materials Science and Engineering
>The Ohio State University
>Columbus, OH 43210-1178
>Email: xut@er6.eng.ohio-state.edu
>
>
Dear Sir,
It makes now 2 years and a half that I am working with SU8 photoepoxy (this
material has partily been developed in our lab at the Swiss Federal Insitute of
Technology in Lausanne in 1996).
One of the first devices that I have done with SU8 are microfluidic devices with
embedded microchannels.
Part of this work has been presented last year at the Transducer97 conference in
Chicago, and you can find the paper in the proceedings of this conference. The 2
processes described there are called the fill- and the mask process. The 2
processes are independent on the formulation of the SU8 used and we were able to
produce channels with cross-sections of 25 times 25 microns. Both technologies
work fine, but they present the problem that it takes a very long time to
develop a channel with a length of more than 1 mm. Therefore we developed a new
process in which we close already developed already developed channels by
laminating photosensitive SU8 films on the top of the structures. By doing this
were realised channels with cross-sections smaller than 10 times 10 microns and
with lengthes of several mm in less than 1 hour. This work will be presented at
the microTAS98 conference in Alberta, Canada, next week and at the Nanotec98
conference in Montreux, Switzerland next month. If you are interested I can send
you a copy of both papers.
We are now creating a small company, called SOTEC MICROSYSTEMS, where we will
sell photoepoxy materials and products.
We have the following photoepoxy variations:
SU8 based photoepoxies:
SM1040 : for thin films (1-10 microns)
SM1042 : for thin films, with better properties concerning the dimensions of
the final structure
SM1060 : for medium size films (10-50 microns)
SM1062 : for medium films,with better properties concerning the dim. of the
final structure
SM1070 : for thick layers (20-500 microns)
SM1072 : for thick films, with better properties concerning the dim. of the
final structure.
Other formulations are possible if required.
other photoepoxies:
SM2060 and SM2062: Similar to SM1060/2, but based on other epoxies and
requiring lower softbake temperatures.
All the solutions are filtered trough a 0.4 micron filter.
The prices are the following ones (for every formulation):
0.5 liter (mimimum quantity) 180 USD or 270,- SFr
1.0 liter
300 USD or 400,- SFr
The prices exclude package, posting and VAT. The bottles are send by normal post
or airmail. If a fast delivery is requested, they are send by fast-mail such as
FedEX or others, at an additional cost of 50 USD (75,- SFr) per mail. The
delivery time is between 2 and 3 weeks.
We are trying to develop new photoepoxies. A first improvement will be
photoepoxies with better adhesion properities, which are more flexible and which
have lower coefficients of thermal expansions. In a second attempt we will try
to develop photoepoxies based on other epoxies, which have other properties and
which might be used for example at higher temperatures (higher than 350 °C; the
maximum temperature of the SU8-based photoepoxies is about 250 °C).
I hope this helps you. Should you have any more questions, please contact me.
Dr Louis J. Guerin
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Dr Louis J. Guerin
Institute for Microsystems
EPFL- Swiss Federal Institute of Technology Lausanne
CH-1015 Lausanne
tél: (+41 21) 693 5857
fax: (+41 21) 693 6670
email: louis.guerin@epfl.ch
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* visit our WEB page on URL: http://dmtwww.epfl.ch/ims
*
*
*
* visit our SU8 WEB page on URL:
*
* http://dmtwww.epfl.ch/ims/micsys/subtopics/projects/su8/EPON.html *
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