Silayte means to treat with a silicon containing vapor which reacts with
the polymer silayting it. Thus the polymer will have silicon in it, or
at least at the surface.

Ed

-----Original Message-----
From: mems-talk-bounces@memsnet.org
[mailto:mems-talk-bounces@memsnet.org] On Behalf Of basar bolukbas
Sent: Friday, January 30, 2009 12:11 AM
To: mems litho
Subject: Re: [mems-talk] Double lithography problem with SU1828-TI35ES


Hello Bill,

Thank you very much for your answer.

What you mean you said ''Silylate''.
How can i set to Silicon barrier? Do you you mean SiN deposition?
If so i can deposite with PECVD-Sputtering.

Best Regards.