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MEMSnet Home: MEMS-Talk: Bilayer PR for 2um Au lift-off process
Bilayer PR for 2um Au lift-off process
2009-02-09
Qinghong Du
2009-02-09
Brad Cantos
2009-02-10
Jason Milne
2009-02-10
Warren Dustin
Bilayer PR for 2um Au lift-off process
Qinghong Du
2009-02-09
Hi

I am looking for bilayer PR lithography to generate undercut for 2um Au lift-off
process. Anyone can sugguest some solutions? Currently I use OCG825 and AZ5214E
bilayer PR, but it is not very stable.

Thank you for your help.

Qinghong
DiCon Fiberoptics, Inc.
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