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MEMSnet Home: MEMS-Talk: Borosilicate glass source
Borosilicate glass source
2009-02-10
Reza Rashidi
2009-02-10
Roger Shile
Borosilicate glass source
Roger Shile
2009-02-10
Pyrex is a borosilicate glass.  You can bond the Pyrex directly to the
silicon wafer without the need to deposit additional borosilicate glass.
In fact borosilicate isn't absolutely necessary for anodic bond.  Any
mobile ion containing glass should work.

Roger Shile

-----Original Message-----
Hi everyone,

I am going to evaporate or sputter a kind of Borosilicate glass (or
similar) on pyrex to anodically bond pyrex to si wafer. Does anyone
knows where I can buy some sample of the glass for evaporation or
sputtering?

Any help will be highly appreciated.

Thanks,
Reza Rashidi

reply
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