Make sure the substrates are perfectly clean before you attach them

Shay


-----Original Message-----
From: [email protected] [mailto:[email protected]]
On Behalf Of jingru zhang
Sent: Wednesday, February 11, 2009 1:33 AM
To: General MEMS discussion
Subject: Re: [mems-talk] Silicon_Glass Fusion Bonding

Hi Bill,

Thank you for your information. We have nitrogen plasma and Oxygen plasma
here, and I will try plasma treatment next time.