Thick uniform coating a paint roller. Thinner uniform coating dilute
the resist and use a small air brush, model manufacturers use them a
lot. Most novel if you want to experiment use a child's bubble wand
create a meniscus of resist and hold the chip vertically and pop it
through the meniscus. Good luck. Bill Moffat
-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of LIN LI
Sent: Wednesday, February 11, 2009 11:44 AM
To: [email protected]
Subject: [mems-talk] pattern on 3by3mm Si Chip
Hi,
Is there a good way to spin coat Photoresist and pattern the metal on a
just 3by3 silicon chip?
I'm having difficulty in getting uniform coating on the small chip.
Thanks.
--
Lin Li
