You might try adding a short hi-speed spin at the end of your spin recipe. The
increased centrifugal force on the thicker edge layer should reduce the edge
bead. This won't hurt and should help some.

Thomas

-----Original Message-----
From: [email protected] [mailto:[email protected]] On
Behalf Of LIN LI
Sent: Wednesday, February 11, 2009 2:44 PM
To: [email protected]
Subject: [mems-talk] pattern on 3by3mm Si Chip


Hi,

Is there a good way to spin coat Photoresist and pattern the metal on a just
3by3 silicon chip?
I'm having difficulty in getting uniform coating on the small chip.

Thanks.

--
Lin Li