Hi,

My first options are the same as Bill, use a roll or spraying the resist. The
bubble idea is great, perhaps the only limitation would be the thickness, but it
sound well.Another option might be create an all around surface to enlarge the
chip area, so the edge doesn't disturb the chip surface. I´d test with PDMS, or
plasticine, this kind of clay paste that children use to mould, or something
like that, easy to handle and easy to remove after deposit the resist.

good luck

Eowin
--- Den ons 2009-02-11 skrev LIN LI :
From: LIN LI 
Subject: [mems-talk] pattern on 3by3mm Si Chip
To: [email protected]

Hi,

Is there a good way to spin coat Photoresist and pattern the metal on a just
3by3 silicon chip?
I'm having difficulty in getting uniform coating on the small chip.

Thanks.

--
Lin Li