Neither ellipsometry nor reflectometry will be able to measure
thicknesses of metal films in excess of about 50 nm.  Thicknesses beyond
50 nm cannot be distinguished optically from a bulk metal.  OTOH, even
an ancient AlphaStep can work just fine.

Al

---
Albert K. Henning, PhD
Director of MEMS Technology
NanoInk, Inc.
215 E. Hacienda Avenue
Campbell, CA  95008
408-379-9069  ext 101
[email protected]


-----Original Message-----
From: Javier Crespo [mailto:[email protected]]
Sent: Monday, February 09, 2009 8:16 AM
To: [email protected]
Subject: [mems-talk] Ti layer measurement...

Dear All,

I want to deposit a Titanium layer to a silicon wafer by sputtering. The
layer is about 100nm, but I don't know how to measure it. Does anyone
know how could I measure the Ti thickness?

Thanks,

Xabier