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MEMSnet Home: MEMS-Talk: Ti/Au or Cr/Au on polyimide
Ti/Au or Cr/Au on polyimide
2009-02-18
DongJuan Xi
Ti/Au or Cr/Au on polyimide
DongJuan Xi
2009-02-18
Hi to all,

I am working on depositing Au thin film on polyimide. Which adhesion
layer will be better, Ti or Cr? If the substrate went through high
temperature process, 400C. Will the result be different?
Thanks if anybody can give me some clues or refer me to some literature.

Dongjuan
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