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MEMSnet Home: MEMS-Talk: Cr/Au as a mask for KOH etch
Cr/Au as a mask for KOH etch
2009-02-18
İlker Comart
2009-02-18
Mehmet Aykol
2009-02-19
jsmilne@ee.uwa.edu.au
2009-02-19
jian zi
2009-02-19
grehder@lme.usp.br
2009-02-21
杨永亮
Cr/Au as a mask for KOH etch
jsmilne@ee.uwa.edu.au
2009-02-19
My colleague tried this with thermally evaporated Cr/Au for a deep KOH
etch of silicon, but the results were very poor.

Jason Milne

Microelectronics Research Group
The University of Western Australia

Quoting ?lker Comart :

> Hi to all,
>
> I want to use sputtered Cr/Au layer as a mask for the anisotropic KOH
> Si etching, however I could not find any resources about this subject
> on the internet. Can Cr/Au layer be suitable for this kind of process?
>
> --
> Ilker Comart
reply
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