I stand corrected.

-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of junjun wu
Sent: Monday, February 23, 2009 11:56 AM
To: General MEMS discussion
Subject: Re: [mems-talk] This is known as RIE Lag RE: XeF2 etching of Si


Hi Edward, no plasma is used in the XeF2 process. As you and Mehmet
pointed out in his comment, this seems to be a universal effect for dry
etching, which I think might have something to do with how fast the
resulting SiF4 can be removed from the surface. I wonder if there are
any ways to alleviate it, such as dilution of the XeF2 vapor,
temperature control, or in stead of static XeF2 soaking using a constant
flow over wafer surface ... Thanks. Junjun

On Sat, Feb 21, 2009 at 7:50 PM, Edward Sebesta 
wrote:

> The problem you are describing is known as RIE Lag. It isn't unique to

> XeF2 etch nor is it due to the gas inlet holes.
>
> There is an excellent paper which covers this issue and an overview of

> more advanced plasma etching at IBM.
>
> http://www.research.ibm.com/journal/rd/431/armacost.html
>
> Search for the term RIE lag. Or aspect ratio. It is a long paper.
>
> You don't mention whether you are using a diode/triode plasma or an
> inductively coupled plasma (High density plasma etching).
>
> Edward H. Sebesta
> Independent Semiconductor/MEMS Engineer

--
Junjun Wu
Twin Creeks Technologies
Phone: 408-759-1426
Fax: 408-986-9142