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MEMSnet Home: MEMS-Talk: Re: Temperture Measurement and gas flow device
Re: Temperture Measurement and gas flow device
1998-10-09
[email protected]
Re: Temperture Measurement and gas flow device
[email protected]
1998-10-09
In a message dated 10/9/98 11:38:31 AM Pacific Daylight Time, [email protected]
writes:

<< Is anyone developing a micro temperaturesensor which incorporates the
 flow (local atmosphere) of thermallly conductive gases (i.e He)?

 Thanks,
 John Burke
 EATON Corporation
   >>
John we have develped a mass flow controller that is based on gas temperature
and
pressure through an orifice.  If that is what u are interested in.

babak taheri
redwood microsystems inc.


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