Hi,

I have used a bonded silicon wafer as an etching mask to make
rectangle openings through Pyrex glass. You can look for details in
this article:

“A silicon cantilever probe card with tip-to-pad electric feed-through
and automatic isolation of the metal coating,” Journal of
Micromechanics and Microengineering, Volume 16, Issue 7, pp.
1215-1220, 2006.


Best regards,
Fei

2009/3/5, Moshe :
> Thank you for all the answers
> I prefer to focus on a way to made holes with wet etch.
> I there a resist so the HF do not strip it ?
> As I said I tried gold and polysilicon and the HF strip it.

Best regards,
Yours sincerely
Fei Wang
______________
Postdoctoral researcher, Dr
MIC - Department of Micro and Nanotechnology
Technical University of Denmark (DTU)
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