I remember seen 26 um thick layer of oxide made by 50 or so SOG coatings.
These things were used for waveguides.

You can however definetely evaporate up to 15 um.



On Mon, 28 Sep 1998, Senthil Nathan Sambandam wrote:

>
> Hi
>
> I need to deposit SiO2 layers about 10 microns thick for a microwave
> device. At the moment, am using spin-on glass (solvent based) as an easy
> way of getting done. However, I am not able to achieve good films beyond
> 4 microns.
>
> Could anybody suggest a better speedier method to deposit SiO2 or a
> better spin-on glass material.
>
> Thanx
>
> Senthil Nathan
>
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