Ultrasonic drilling is well suited for this task, and commonly used.

There is a commercial source which I have used in the past.  I have no
fiduciary benefit to recommending it.  And, virtually everyone in the
MEMS business either uses them, or knows of them, and thinks well of
them.

Nonetheless, the mems-talk moderator refuses to let me mention the name
of this source.  So, if you want to know the name, either google
'ultrasonic pyrex wafer hole drilling', which will give you a spectrum
of possible suppliers, or send me an email for the specific name I have
used in the past with success.

Al

---
Albert K. Henning, PhD
Director of MEMS Technology
NanoInk, Inc.
215 E. Hacienda Avenue
Campbell, CA  95008
408-379-9069  ext 101
ahenning@nanoink.net

-----Original Message-----
From: mems-talk-bounces@memsnet.org
[mailto:mems-talk-bounces@memsnet.org]
On Behalf Of Moshe
Sent: Wednesday, March 04, 2009 10:24 AM
To: General MEMS discussion
Subject: [mems-talk] Looking for mask to make holes in glass

Hello

I am looking for a way to make holes 1 mm diameter in glass.
I did gold mask on the glass and  tried polysilicon as a mask too but
the HF stripped the masks.

Do you have a solution for the mask ?

Thank you