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MEMSnet Home: MEMS-Talk: Re: Ni-compatible Cu etchants
Re: Ni-compatible Cu etchants
1998-10-12
Armin Kuebelbeck
1998-10-12
Yohannes
Re: Ni-compatible Cu etchants
Armin Kuebelbeck
1998-10-12
Hi,

Best way to solve these problem is to use a caustic etchant. An
excellent one is to use CuSO4 mixed with Ammonia. It will build a
tetra-ammin complex Cu(NH3)4++ which is the active etchant of the
Copper. It will never attac Nickel.

Best regards

Armin

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