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MEMSnet Home: MEMS-Talk: Philips XL 30 ESEM HTSU Arching Over 10kV
Philips XL 30 ESEM HTSU Arching Over 10kV
2009-03-11
Qinghong Du
2009-03-12
Brian Stahl
2009-03-12
Qinghong Du
Philips XL 30 ESEM HTSU Arching Over 10kV
Qinghong Du
2009-03-11
Hi,

We have a Philips XL30 ESEM system. Recently, the system only can work under
10kV. Over 10kV, there is arching issue in the HTSU unit. Does anybody have this
experience and any idea to fix it?

Thanks a lot.

Du
reply
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