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MEMSnet Home: MEMS-Talk: Gold Oxide
Gold Oxide
2009-03-13
Yoshi Sakata
2009-03-13
Bill Moffat
2009-03-13
Cao, Zongliang
2009-03-13
Gabriel Matus
2009-03-13
Gary Hillman
Gold Oxide
Cao, Zongliang
2009-03-13
If you had some high-temperature processing, there might be TiO2 on the
Au/ambient interface. Someone said Ti may diffuse through the grain boundary
of Au. I am not sure if this is what happened to your samples.

On Fri, Mar 13, 2009 at 12:50 AM, Yoshi Sakata wrote:

> Hi All,
>
> I'm trying to clean the Pyrex wafers with NH4OH + H2O2. The wafer has
> the Au/Ti film on the surface. I have the oxide or something on the
> surface of Au. So it is very difficult for me to have the electrical
> contact with the surface of Au. Does anybody know what is on the
> surface of Au, how I can remove this oxide?
>
> Regards,
> Yoshi
reply
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