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MEMSnet Home: MEMS-Talk: Cr-Au as Mask in phosphoric acid
Cr-Au as Mask in phosphoric acid
2009-03-15
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Cr-Au as Mask in phosphoric acid
Prem Pal
2009-03-15
Dear Researchers,

I would highly appreciate if anyone share the experience of nitride wet etching
in phosphoric acid with Cr-Au as mask.

Best regards
Prem
Nagoya University, Japan
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