A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: ask for help -recipe for SPR511A and MF CD-26
ask for help -recipe for SPR511A and MF CD-26
2009-03-15
QiuWeibin
ask for help -recipe for SPR511A and MF CD-26
QiuWeibin
2009-03-15
Hi all

   Is there anyone who has the experiences on SPR511A photoresist with developer
MF CD-26 ?

   I used  Karl Suss MBJ-3 mask aligner, and could not get a good pattern even
for 2um with developer MF CD-26. is there anyone who can help me? thanks a lot.

    Qiu
reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Process Variations in Microsystems Manufacturing
University Wafer
MEMStaff Inc.
Addison Engineering