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MEMSnet Home: MEMS-Talk: Pd as an adhesion layer?
Pd as an adhesion layer?
2009-03-18
Taekyung Kim
2009-03-18
Kirt Williams
2009-03-18
Wilson, Thomas
2009-03-18
Don Friedrich
Pd as an adhesion layer?
Taekyung Kim
2009-03-18
Hello folks,

I am looking for an adhesion layer between SiO2 and Pt.
Since my process restriction, I can't use Ti, Cr, and Al.
Is Pd a fairly good adhesion material for Pt-SiO2?

Thanks

TK
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