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MEMSnet Home: MEMS-Talk: Pd as an adhesion layer?
Pd as an adhesion layer?
2009-03-18
Taekyung Kim
2009-03-18
Kirt Williams
2009-03-18
Wilson, Thomas
2009-03-18
Don Friedrich
Pd as an adhesion layer?
Wilson, Thomas
2009-03-18
Kirt,

Interestingly, US patent #5191510, entitled, "Use of Palladium as an adhesion
layer and as an electrode in ferroelectric memory devices", describes a process
in which Pd is used as an adhesion layer on silicon dioxide.


Thomas E. Wilson
Professor of Physics
Marshall University
Science 154
One John Marshall Drive
Huntington, WV  25755-2570
Tel: 304.696.2752
FAX: 304.696.2494

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