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MEMSnet Home: MEMS-Talk: Aspect Ratio
Aspect Ratio
2009-03-22
Evelyn B
2009-03-23
Edward Sebesta
Aspect Ratio
Evelyn B
2009-03-22
Hi all,

In reviewing my process flow using Coventorware I have noticed some aspect
ratios that seem quite low.  They vary from 0.25 and can get as low as
0.01.  Can anyone provide a good rule of thumb for an aspect ratio using wet
processes?

Thanks,

Evelyn

--
EVELYN BENABE
Graduate Research Assistant
RF Microsystems Research Group
University of South Florida
4202 East Fowler Avenue
Tampa, FL 33620
Office: ENB 412
Office Phone: (813)-974-4851
Email: [email protected]
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