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MEMSnet Home: MEMS-Talk: Re: MEMS mask layout software
Re: MEMS mask layout software
1995-10-04
Brett Warneke
1995-10-04
Beverley Eyre
1995-10-04
Evan D. H. Green
1995-10-05
Ashok Srivastava
1995-10-06
[email protected]
1995-10-06
[email protected]
1995-10-07
Ash Parameswaran
1995-10-19
[email protected]
1995-10-20
Brett Warneke
Re: MEMS mask layout software
[email protected]
1995-10-19
A possible choice for layout software is the newly developed IntelliCAD system.
IntelliCAD consists of a layout editor with CIF and GDS-II compatibility; and
much more. It also consists of material and fabrication databases, a solid
modeler for visualization of a device, an expert-system based process debugger,
a process simulation module (including SUPREM), an electrostatic simulation
module, a finite element simulation module, ..........

IntelliCAD will allow users to input step by step fabrication process recipes
and mask layouts. By simple commands, users can simulate the thermo-mechanical
or coupled electrostatic-mechanical performance of a device at any fabrication
step. This system will run on all major UNIX platforms that support X-windows.
On November 15, 1995, researchers at IntelliSense will release the complete
IntelliCAD. We will be looking for Universities to make beta site arrangements
on the future developments.

To see IntelliCAD information on the worldwide web please log in:

http://northshore.shore.net/~intellis/intcada.html IntelliSense Corporation
16 Upton Drive
Wilmington, MA 01887
(508) 988 - 8000
(508) 988 - 8001 fax


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