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MEMSnet Home: MEMS-Talk: KOH - backside etch - frontside protection
KOH - backside etch - frontside protection
2009-03-23
Chris P. Park
2009-03-24
Andrea Lucibello
2009-03-24
Chris P. Park
2009-03-24
Chris P. Park
KOH - backside etch - frontside protection
Chris P. Park
2009-03-23
Hi all,

I'm planning on a process where I want to create membranes in a KOH etch from
the back side but the front-side is already structured and must remain dry. I
want to control the membrane thickness (~18ยต) optically. Does anyone have
experience with such a process or knowledge on the equipment I would need?

Thanks a lot !!




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