A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: higher-temperature photoresist
higher-temperature photoresist
1998-09-30
[email protected]
higher-temperature photoresist
[email protected]
1998-09-30
Hello,

I'm looking for a photoresist process with the following characteristics:
1    Can be rendered photoinactive by some process
2    Can then be patterned by dry etching, and retain that pattern even
when subsequently subject to 230C
3    Can still be removed cleanly after the 230C temperature cycle

Thank you for suggestions,
Robert Mihailovich
Rockwell


reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
MEMStaff Inc.
University Wafer
The Branford Group
Mentor Graphics Corporation