Since mid-June, our Orbit2.0 chips have exhibited a discoloration
when etched with XeF2. This discoloration appears to be due to a new layer
or surface treatment that has been added to this fab process. Does anyone
have any info about this, or similar experiences? We would like to know
what the substance is, so that we can remove it, maybe with a stripper,
before starting the etch. Any thoughts are welcome. Thanks.

-Matt Hopcroft
[email protected]




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Matt Hopcroft
NIST
Bldg 225 Rm 307A
Gaithersburg, MD 20899
(301)975-4796