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MEMSnet Home: MEMS-Talk: Bearing holes in pyrex/glass wafers
Bearing holes in pyrex/glass wafers
2009-05-01
김태진
2009-05-01
Mehmet Aykol
2009-05-01
Kirt Williams
2009-05-02
Brian Stahl
2009-05-02
[email protected]
2009-05-02
Xiaoguang Liu
2009-05-02
Jackgong Hotmail
2009-05-02
HENRI FLECHNER
2009-05-03
Jackgong Hotmail
2009-05-04
Fei Wang
2009-05-04
Robert MacDonald
2009-05-06
김태진
2009-05-04
%Mihaela Carp
2009-05-02
HENRI FLECHNER
2009-05-03
tarun mudgal
2009-05-05
Jackgong Hotmail
2009-05-04
Tomblin, Graham
Bearing holes in pyrex/glass wafers
김태진
2009-05-01
Hi all!

I'm trying to think of a way to make a 2mm diameter through hole in a pyrex
wafer.

I thought of etching the hole with DRIE, but thought it was inefficient and time
consuming.

It also seems that I can't use conventional drilling machines to bear holes in
the pyrex as the substrate is to brittle.

Does anyone know how to drill holes in pyrex/glass wafers?

The features don't have to be too accurate..

Thanks!

TJ
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