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MEMSnet Home: MEMS-Talk: effects of glass thickness on anodic bonding
effects of glass thickness on anodic bonding
2009-05-03
tarun mudgal
effects of glass thickness on anodic bonding
tarun mudgal
2009-05-03
hii

I am bonding glass wafers of different thicknesses to siliocn wafers and
found the time taken is increasing, moreover the number of air bubbles
also found to be increased.

does anybody have the precise explanation for that behaviour.
moreover i would like to know the effect of increasing oxide thickness on
bonding parameters.

thnx
reply
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