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MEMSnet Home: MEMS-Talk: Glueing Si wafer to glass disk
Glueing Si wafer to glass disk
2009-05-07
Maria Matschuk
2009-05-07
Tony Price
Glueing Si wafer to glass disk
Tony Price
2009-05-07
Hello,

If this is just a temporary fixture, you may be able to use
photoresist to glue the backside of your silicon wafer to your glass
disk.  If you get to a point in which you don't need the glass disk
anymore, you should be able to remove the resist using acetone to
unglue your Si wafer from the glass disk.  Hope this helps.

Tony P

On Thu, May 7, 2009 at 9:43 AM, Maria Matschuk
 wrote:
> Dear all,
>
> I need to fix a Silicon wafer (coated with resist) to a glass disk. Does
anyone have experience with some kind of glue (or another method)?
>
> Kind Regards
>
> Maria

--
Tony Price
Department of Electrical Engineering
University of South Florida
4202 E. Fowler Avenue, ENB-118,
Tampa, FL, 33620
Office: ENG 108
Phone: (813) 396-9310
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