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MEMSnet Home: MEMS-Talk: Could anyone recommend NEGATIVE photoresist withstanding BOE?
Could anyone recommend NEGATIVE photoresist withstanding BOE?
2009-05-15
Wang, Yu
2009-05-15
Joseph Grogan
Could anyone recommend NEGATIVE photoresist withstanding BOE?
Wang, Yu
2009-05-15
Hi,

I'm looking for negative photoresist that can withstand 6:1 BOE for a long time
(10 hours or longer), and would be very grateful if you could recommend any
commercial product.

Thanks,

Yu Wang
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