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MEMSnet Home: MEMS-Talk: Re: Bonding bulk PZT to Silicon/Other
Re: Bonding bulk PZT to Silicon/Other
1998-10-18
HaroldLSJ@aol.com
1998-10-19
Fahrettin Levent Degertekin
1998-11-04
bob lyness
1998-11-05
Phil Rayner
Re: Bonding bulk PZT to Silicon/Other
HaroldLSJ@aol.com
1998-10-18
Phil,

I assume you understand the mechanical and electrical implications of directly
bonding bulk PZT to stainless steel or silicon and their possible interaction
with your micro-motor.  Make sure you model the 3D electro-mechanical
consequences of such a structure before you continue.  You may find it helpful
to pre-etch the stainless or silicon so your mounting surface matches the zero
node surface in the PZT.

Harold Snyder


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