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MEMSnet Home: MEMS-Talk: metal on tungsten
metal on tungsten
2009-06-02
Andrea Mazzolari
2009-06-02
Robert Bock
2009-06-02
Denis Petrov
2009-06-02
David Roberts
2009-06-02
Andrea Mazzolari
metal on tungsten
Andrea Mazzolari
2009-06-02
Hi all,

i need to deposit about 50-100um of any metal on tungsten.
After that, i need to polish the metal layer in order to obtain a
mirror-like surface. So, the metal to be deposited must satisfy 2
requirements:

1) good adhesion to tungsten

2) it must provide a mirror-like surface by using polishing operation.

Any suggestion about the optimal metal to be deposited and the deposition
technique ?

Best regards,
Andrea

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