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MEMSnet Home: MEMS-Talk: metal on tungsten
metal on tungsten
2009-06-02
Andrea Mazzolari
2009-06-02
Robert Bock
2009-06-02
Denis Petrov
2009-06-02
David Roberts
2009-06-02
Andrea Mazzolari
metal on tungsten
Robert Bock
2009-06-02
> Hi all,
>
> i need to deposit about 50-100um of any metal on tungsten.
> After that, i need to polish the metal layer in order to
> obtain a mirror-like surface. So, the metal to be deposited
> must satisfy 2
> requirements:
>
> 1) good adhesion to tungsten
>
> 2) it must provide a mirror-like surface by using polishing operation.
>
> Any suggestion about the optimal metal to be deposited and
> the deposition technique ?
>
> Best regards,
> Andrea

Andrea,
If I were doing something like this (I use both W and Ni in my processes
daily, but differently) I'd try electroplating the Ni onto the W substrate
and then polish.  You can certainly get a mirror finish with polished
nickel.

Robert
reply
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