Hi Andrea,

You can plate Ni or NiCo on W assuming it's thick enough.
If it's a thin W film < 300nm or so, you'd have to coat it first with
sputtered Ni, or Au.

David Roberts (Wafer Plating Specialist)
Prodigy Surface Tech
807 Aldo Ave., Suite 103
Santa Clara, CA 95054

-----Original Message-----
From: Andrea Mazzolari [mailto:[email protected]]
Sent: Tuesday, June 02, 2009 4:00 AM
To: General MEMS discussion
Subject: [mems-talk] metal on tungsten

Hi all,

i need to deposit about 50-100um of any metal on tungsten.
After that, i need to polish the metal layer in order to obtain a
mirror-like surface. So, the metal to be deposited must satisfy 2
requirements:

1) good adhesion to tungsten

2) it must provide a mirror-like surface by using polishing operation.

Any suggestion about the optimal metal to be deposited and the deposition
technique ?

Best regards,
Andrea