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MEMSnet Home: MEMS-Talk: NR9-1500PY process recipe
NR9-1500PY process recipe
2009-06-09
li shifeng
2009-06-09
Alex Mellnik
NR9-1500PY process recipe
li shifeng
2009-06-09
Hi, All,

I am using NR9-1500PY to make 1 micron features on the glass substrate. I am
looking for some reliable recipes to start as my baseline. Thanks!

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