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MEMSnet Home: MEMS-Talk: Anybody using Sb/Au or Sb/Ag contact before?
Anybody using Sb/Au or Sb/Ag contact before?
2009-06-10
Chong Liu
Anybody using Sb/Au or Sb/Ag contact before?
Chong Liu
2009-06-10
Hi,

Does anybody have some experience in using Sb/Au or Sb/Ag as contact for
n-type Si? I tried recently and I have some problem with the lift-off after
thermal evaporation of 10nm Sb and 100nm Ag. Is there anything reaction
happening here?

By the way, is this a good candidate for small contact area, like ~1um wide
electrode?

Thank you so much!

Chong
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